4th Round Table on Micro/Nano Technologies for Space
Chapter title
Silicon microfabrication of 3D terahertz waveguide and optical components
Pages:
1 to 1
Authors
Ederra Urzainqui, Iñigo
Teniente Vallinas, Jorge
Publishing house
ESTEC
Publisher
Place
Noordwijk (Holanda)
Year
2003
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